Methods of forming a transition metal containing film on a substrate by a cyclical deposition process

ABSTRACT

Methods of forming a transition metal containing film on a substrate by a cyclical deposition process are disclosed. The methods may include: contacting the substrate with a first vapor phase reactant comprising a transition metal halide compound comprising a bidentate nitrogen containing adduct ligand; and contacting the substrate with a second vapor phase reactant comprising a reducing agent precursor. The deposition methods may also include forming a transition metal containing film with an electrical resistivity of less than 50 μΩ-cm at a film thickness of less than 50 nanometers.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of and claims priority to U.S. patent application Ser. No. 16/736,336 filed Jan. 7, 2020 titled METHODS OF FORMING A TRANSITION METAL CONTAINING FILM ON A SUBSTRATE BY A CYCLICAL DEPOSITION PROCESS; which claims priority to U.S. Provisional Patent Application Ser. No. 62/793,664 filed Jan. 17, 2019, titled METHODS OF FORMING A TRANSITION METAL CONTAINING FILM ON A SUBSTRATE BY A CYCLICAL DEPOSITION PROCESS, the disclosures of which are hereby incorporated by reference in their entirety.

PARTIES OF JOINT RESEARCH AGREEMENT

The invention claimed herein was made by, or on behalf of, and/or in connection with a joint research agreement between University of Helsinki and ASM Microchemistry Oy. The agreement was in effect on and before the date the claimed invention was made, and the claimed invention was made as a result of activities undertaken within the scope of the agreement.

FIELD OF INVENTION

The present disclosure relates generally to methods for forming a transition metal containing film on a substrate by a cyclical deposition process and particular methods for forming cobalt, or nickel containing films.

BACKGROUND OF THE DISCLOSURE

Semiconductor device fabrication processes in advanced technology nodes generally require state of the art deposition methods for forming transition metal containing films, such as, for example, one or more of elemental transition metals, or transition metal nitrides.

A common requisite for the deposition of transition metal containing films is that the deposition process is extremely conformal. For example, conformal deposition is often required in order to uniformly deposit a transition metal containing film over three-dimensional structures including high aspect ratio features. Another common requirement for the deposition of transition metal containing films is that the deposition process is capable of depositing ultra-thin films which are continuous over a large substrate area. In the particular case wherein the transition metal containing film is electrically conductive, the deposition process may need to be optimized to produce low electrical resistivity films.

Cyclical deposition processes, such as, for example, atomic layer deposition (ALD) and cyclical chemical vapor deposition (CCVD), sequentially introduce one or more precursors (reactants) into a reaction chamber wherein the precursors react on the surface of the substrate one at a time in a sequential, self-limiting, manner. Cyclical deposition processes have been demonstrated which produce metal containing films with excellent conformality with atomic level thickness control.

Cyclical deposition processes may be utilized for the deposition of transition metal containing films. However, chemical precursors suitable for the cyclical deposition of transition metal containing films, and particularly cobalt or nickel containing films are uncommon and cost prohibitive. In addition, the transition metal containing films may benefit from having a low electrical resistivity, particular when the transition metal containing films may be utilized as an electrode component of a semiconductor device structure.

Accordingly, cyclical deposition methods are desirable for the formation of transition metal containing films, and particularly cobalt, or nickel containing films with a low electrical resistivity.

SUMMARY OF THE DISCLOSURE

This summary is provided to introduce a selection of concepts in a simplified form. These concepts are described in further detail in the detailed description of example embodiments of the disclosure below. This summary is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used to limit the scope of the claimed subject matter.

In some embodiments of the disclosure, methods for forming a transition metal containing film on a substrate by a cyclical deposition process are provided. A method may comprise: contacting the substrate with a first vapor phase reactant comprising a transition metal halide compound comprising a bidentate nitrogen containing adduct ligand; and contacting the substrate with a second vapor phase reactant comprising a reducing agent precursor; wherein the transition metal containing film has an electrical resistivity of less than 50 μΩ-cm at a film thickness of less than 50 nanometers.

For purposes of summarizing the invention and the advantages achieved over the prior art, certain objects and advantages of the invention have been described herein above. Of course, it is to be understood that not necessarily all such objects or advantages may be achieved in accordance with any particular embodiment of the invention. Thus, for example, those skilled in the art will recognize that the invention may be embodied or carried out in a manner that achieves or optimizes one advantage or group of advantages as taught or suggested herein without necessarily achieving other objects or advantages as may be taught or suggested herein.

All of these embodiments are intended to be within the scope of the invention herein disclosed. These and other embodiments will become readily apparent to those skilled in the art from the following detailed description of certain embodiments having reference to the attached figures, the invention not being limited to any particular embodiment(s) disclosed.

BRIEF DESCRIPTION OF THE DRAWING FIGURES

While the specification concludes with claims particularly pointing out and distinctly claiming what are regarded as embodiments of the invention, the advantages of embodiments of the disclosure may be more readily ascertained from the description of certain examples of the embodiments of the disclosure when read in conjunction with the accompanying drawings, in which:

FIG. 1 illustrates a process flow of an exemplary cyclical deposition method according to the embodiments of the disclosure; and

FIG. 2 illustrates x-ray photoelectron spectroscopy data obtained from an exemplary transition metal containing film deposited according to the embodiments of the disclosure.

DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS

Although certain embodiments and examples are disclosed below, it will be understood by those in the art that the invention extends beyond the specifically disclosed embodiments and/or uses of the invention and obvious modifications and equivalents thereof. Thus, it is intended that the scope of the invention disclosed should not be limited by the particular disclosed embodiments described below.

The illustrations presented herein are not meant to be actual views of any particular material, structure, or device, but are merely idealized representations that are used to describe embodiments of the disclosure.

As used herein, the term “cyclic deposition” may refer to the sequential introduction of precursors (reactants) into a reaction chamber to deposit a film over a substrate and includes deposition techniques such as atomic layer deposition and cyclical chemical vapor deposition.

As used herein, the term “cyclical chemical vapor deposition” may refer to any process wherein a substrate is sequentially exposed to two or more volatile precursors, which react and/or decompose on a substrate to produce a desired deposition.

As used herein, the term “substrate” may refer to any underlying material or materials that may be used, or upon which, a device, a circuit or a film may be formed.

As used herein, the term “atomic layer deposition” (ALD) may refer to a vapor deposition process in which deposition cycles, preferably a plurality of consecutive deposition cycles, are conducted in a process chamber. Typically, during each cycle the precursor is chemisorbed to a deposition surface (e.g., a substrate surface or a previously deposited underlying surface such as material from a previous ALD cycle), forming a monolayer or sub-monolayer that does not readily react with additional precursor (i.e., a self-limiting reaction). Thereafter, if necessary, a reactant (e.g., another precursor or reaction gas) may subsequently be introduced into the process chamber for use in converting the chemisorbed precursor to the desired material on the deposition surface. Typically, this reactant is capable of further reaction with the precursor. Further, purging steps may also be utilized during each cycle to remove excess precursor from the process chamber and/or remove excess reactant and/or reaction byproducts from the process chamber after conversion of the chemisorbed precursor. Further, the term “atomic layer deposition,” as used herein, is also meant to include processes designated by related terms such as, “chemical vapor atomic layer deposition,” “atomic layer epitaxy” (ALE), molecular beam epitaxy (MBE), gas source MBE, or organometallic MBE, and chemical beam epitaxy when performed with alternating pulses of precursor composition(s), reactive gas, and purge (e.g., inert carrier) gas.

As used herein, the term “film,” “thin film,” “layer” and “thin layer” may refer to any continuous or non-continuous structures and material deposited by the methods disclosed herein. For example, “film,” “thin film,” “layer” and “thin layer” could include 2D materials, nanorods, nanotubes, nanolaminates, or nanoparticles or even partial or full molecular layers or partial or full atomic layers or clusters of atoms and/or molecules. “Film,” “thin film,” “layer” and “thin layer” may comprise material or a layer with pinholes, but still be at least partially continuous.

As used herein, the term “transition metal containing film” may refer to a film containing a transition metal species, including, but not limited to, elemental transition metals, transition metal oxides, transition metal nitrides, transition metal silicides, transition metal selenides, transition metal phosphides, transition metal borides, and mixtures thereof. In addition, the term “transition metal containing film” may refer to a film containing a transition metal species as well as containing carbon and/or hydrogen.

A number of example materials are given throughout the embodiments of the current disclosure, it should be noted that the chemical formulas given for each of the example materials should not be construed as limiting and that the non-limiting example materials given should not be limited by a given example stoichiometry.

The present disclosure includes methods for forming transition metal containing films on a substrate and particular methods for the cyclical deposition of a transition metal containing film on a substrate. The embodiments of the disclosure may include methods for the cyclical deposition of transition metal containing films, such as, for example, cobalt containing films, or nickel containing films.

Therefore, the embodiments of the disclosure may comprise a method of forming a transition metal containing film on a substrate by a cyclical deposition process. The method may comprise: contacting the substrate with a first vapor phase reactant comprising a transition metal halide compound comprising a bidentate nitrogen containing adduct ligand; and contacting the substrate with a second vapor phase reactant comprising a reducing agent precursor; wherein the transition metal containing film has an electrical resistivity of less than 50 g2-cm at a film thickness of less than 50 nanometers.

In some embodiments of the disclosure, a transition metal containing film may be deposited by a cyclical deposition process utilizing a transition metal halide compound as the metal precursor. A non-limiting example embodiment of a cyclical deposition process may include atomic layer deposition (ALD), wherein ALD is based on typically self-limiting reactions, whereby sequential and alternating pulses of reactants are used to deposit about one atomic (or molecular) monolayer of material per deposition cycle. The deposition conditions and precursors are typically selected to provide self-saturating reactions, such that an adsorbed layer of one reactant leaves a surface termination that is non-reactive with the gas phase reactants of the same reactant. The substrate is subsequently contacted with a different reactant that reacts with the previous termination to enable continued deposition. Thus, each cycle of alternated pulses typically leaves no more than about one monolayer of the desired material. However, as mentioned above, the skilled artisan will recognize that in one or more ALD cycles more than one monolayer of material may be deposited, for example, if some gas phase reactions occur despite the alternating nature of the process.

In an ALD-type process for depositing a transition metal containing film, one deposition cycle may comprise, contacting the substrate to a first reactant, removing any unreacted first reactant and reaction byproducts from the reaction space, and contacting the substrate to a second reactant, followed by a second removal step. The first reactant may comprise a transition metal halide compound (“the metal precursor”) and the second reactant may comprise a reducing agent precursor.

Precursors may be separated by inert gases, such as argon (Ar) or nitrogen (N₂), to prevent gas-phase reactions between reactants and enable self-saturating surface reactions. In some embodiments, however, the substrate may be moved to separately contact a first vapor phase reactant and a second vapor phase reactant. Because the reactions self-saturate, strict temperature control of the substrates and precise dosage control of the precursors may not be required. However, the substrate temperature is preferably such that an incident gas species does not condense into monolayers nor decompose on the surface. Surplus chemicals and reaction byproducts, if any, are removed from the substrate surface, such as by purging the reaction space or by moving the substrate, before the substrate is contacted with the next reactive chemical. Undesired gaseous molecules can be effectively expelled from a reaction space with the help of an inert purging gas. A vacuum pump may be used to assist in the purging.

Reactors capable of being used to deposit transition metal containing films can be used for the deposition. Such reactors include ALD reactors, as well as CVD reactors equipped with appropriate equipment and means for providing the precursors. According to some embodiments, a showerhead reactor may be used. According to some embodiments, cross-flow, batch, minibatch, or spatial ALD reactors may be used.

In some embodiments of the disclosure, a batch reactor may be used. In some embodiments, the wafers rotate during processing. In some embodiments, the batch reactor comprises a minibatch reactor configured to accommodate 10 or fewer wafers, 8 or fewer wafers, 6 or fewer wafers, 4 or fewer wafers, or 2 or fewer wafers. In some embodiments in which a batch reactor is used, wafer-to-wafer non-uniformity is less than 3% (1sigma), less than 2%, less than 1% or even less than 0.5%.

The deposition processes described herein can optionally be carried out in a reactor or a reaction chamber connected to a cluster tool. In a cluster tool, because each reaction chamber is dedicated to one type of process, the temperature of the reaction chamber in each module can be kept constant, which improves the throughput compared to a reactor in which the substrate is heated up to the process temperature before each run. Additionally, in a cluster tool it is possible to reduce the time to pump the reaction chamber to the desired process pressure levels between substrates. In some embodiments of the disclosure, the deposition process may be performed in a cluster tool comprising multiple reaction chambers, wherein each individual reaction chamber may be utilized to expose the substrate to an individual precursor gas and the substrate may be transferred between the different reaction chambers for exposure to multiple precursors gases, the transfer of the substrate being performed under a controlled ambient to prevent oxidation/contamination of the substrate. In some embodiments of the disclosure, the deposition process may be performed in a cluster tool comprising multiple reaction chambers, wherein each individual reaction chamber may be configured to heat the substrate to a different deposition temperature.

A stand-alone reactor can be equipped with a load-lock. In that case, it is not necessary to cool down the reaction space between each run. In some embodiments, a deposition process for depositing a transition metal containing film may comprise a plurality of deposition cycles, for example, ALD cycles, or cyclical CVD cycles.

In some embodiments, the cyclical deposition processes are used to form transition metal containing films on a substrate and the cyclical deposition process may be an ALD type process. In some embodiments, the cyclical deposition may be a hybrid ALD/CVD or cyclical CVD process. For example, in some embodiments, the growth rate of the ALD process may be low compared with a CVD process. One approach to increase the growth rate may be that of operating at a higher substrate temperature than that typically employed in an ALD process, resulting in a chemical vapor deposition process, but still taking advantage of the sequential introduction of precursors, such a process may be referred to as cyclical CVD. In some embodiments, a cyclical CVD process may comprise the introduction of two or more precursors into the reaction chamber wherein there may be a time period of overlap between the two or more precursors in the reaction chamber resulting in both an ALD component of the deposition and a CVD component of the deposition. For example, a cyclical CVD process may comprise the continuous flow of a one precursor and the periodic pulsing of a second precursor into the reaction chamber.

According to some embodiments of the disclosure, ALD processes may be used to deposit a transition metal containing film on a substrate, such as a partially fabricated semiconductor device structure. In some embodiments of the disclosure, each ALD cycle comprises two distinct deposition steps or phases. In a first phase of the deposition cycle (“the metal phase”), the substrate surface on which deposition is desired is contacted with a first vapor phase reactant comprising a metal precursor which chemisorbs onto the substrate surface, forming no more than about one monolayer of reactant species on the surface of the substrate. In a second phase of the deposition, the substrate surface on which deposition is desired is contacted with a second vapor phase reactant comprising a reducing agent precursor, wherein the second vapor phase reactant may react with transition metal species on a surface of the substrate to form a transition metal containing film on the substrate, such as, for example, an elemental transition metal, or a transition metal nitride, or mixtures thereof.

In some embodiments of the disclosure, the first vapor phase reactant may comprise a metal containing precursor, also referred to here as the “metal compound.” In some embodiments, the first vapor phase reactant may comprise a transition metal compound with an adduct forming ligand. In some embodiments, the first vapor phase reactant may comprise a transition metal compound. In some embodiments, the first vapor phase reactant may comprise a transition metal halide compound. In some embodiments, the first vapor phase reactant may comprise a transition metal compound with an adduct forming ligand, such as monodentate, bidentate, or multidentate adduct forming ligand. In some embodiments, the first vapor phase reactant may comprise a transition metal halide compound with adduct forming ligand, such as monodentate, bidentate, or multidentate adduct forming ligand. In some embodiments, the first vapor phase reactant may comprise a transition metal compound with adduct forming ligand comprising nitrogen, such as monodentate, bidentate, or multidentate adduct forming ligand comprising nitrogen. In some embodiments, the first vapor phase reactant may comprise a transition metal compound with adduct forming ligand comprising phosphorous, oxygen, or sulfur, such as monodentate, bidentate, or multidentate adduct forming ligand comprising phosphorous, oxygen or sulfur. For example, in some embodiments, the transition metal halide compound may comprise a transition metal chloride, a transition metal iodide, a transition metal fluoride, or a transition metal bromide. In some embodiments of the disclosure, the transition metal halide compound may comprise a transition metal species, including, but not limited to, at least one of cobalt, or nickel. In some embodiments of the disclosure, the transition metal halide compound may comprise at least one of a cobalt chloride, or a nickel chloride. In some embodiments, the transition metal halide compound may comprise a bidentate nitrogen containing adduct forming ligand. In some embodiment, the transition metal halide compound may comprise an adduct forming ligand including two nitrogen atoms, wherein each of the nitrogen atoms are bonded to at least one carbon atom. In some embodiments of the disclosure, the transition metal halide compound comprises one or more nitrogen atoms bonded to a central transition metal atom thereby forming a metal complex.

In some embodiments of the disclosure, the first vapor phase reactant may comprise a transition metal compound having the formula (I):

(adduct)_(n)-M-X_(a)  (I)

wherein each of the “adducts” is an adduct forming ligand and can be independently selected to be a mono-, a bi-, or a multidentate adduct forming ligand or mixtures thereof: n is from 1 to 4 in case of monodentate forming ligand, n is from 1 to 2 in case of bi- or multidentate adduct forming ligand; M is a transition metal, such as, for example, cobalt (Co), or nickel (Ni); wherein each of X_(a) is another ligand, and can be independently selected to be a halide or other ligand; wherein a is from 1 to 4, and some instances a is 2.

In some embodiments of the disclosure, the adduct forming ligand in the transition metal compound, such as a transition metal halide compound, may comprise a monodentate, bidentate, or multidentate adduct forming ligand which coordinates to the transition metal atom, of the transition metal compound, through at least one of a nitrogen atom, a phosphorous atom, an oxygen atom, or a sulfur atom. In some embodiments of the disclosure, the adduct forming ligand in the transition metal compound may comprise a cyclic adduct ligand. In some embodiments of the disclosure, the adduct forming ligand in the transition metal compound may comprise mono, di-, or polyamines. In some embodiments of the disclosure, the adduct forming ligand in the transition metal compound may comprise mono-, di-, or polyethers. In some embodiments, the adduct forming ligand in the transition metal compound may comprise mono-, di-, or polyphosphines. In some embodiments, the adduct forming ligand in the transition metal compound may comprise carbon and/or in addition to the nitrogen, oxygen, phosphorous, or sulfur in the adduct forming ligand.

In some embodiments of the disclosure, the adduct forming ligand in the transition metal compound may comprise one monodentate adduct forming ligand. In some embodiments of the disclosure, the adduct forming ligand in the transition metal compound may comprise two monodentate adduct forming ligands. In some embodiments of the disclosure, the adduct forming ligand in the transition metal compound may comprise three monodentate adduct forming ligand. In some embodiments of the disclosure, the adduct forming ligand in the transition metal compound may comprise four monodentate adduct forming ligands. In some embodiments of the disclosure, the adduct forming ligand in the transition metal compound may comprise one bidentate adduct forming ligand. In some embodiments of the disclosure, the adduct forming ligand in the transition metal compound may comprise two bidentate adduct forming ligands. In some embodiments of the disclosure, the adduct forming ligand in the transition metal compound may comprise one multidentate adduct forming ligand. In some embodiments of the disclosure, the adduct forming ligand in the transition metal compound may comprise two multidentate adduct forming ligands.

In some embodiments of the disclosure, the adduct forming ligand comprises nitrogen, such as an amine, a diamine, or a polyamine adduct forming ligand. In such embodiments, the transition metal compound may comprise at least one of, triethylamine (TEA), N,N,N′,N′-tetramethyl-1,2-ethylenediamine (CAS: 110-18-9) (TMEDA), N,N,N′,N′-Tetraethylethylenediamine (CAS: 150-77-6) (TEEDA), N,N′-diethyl-1,2-ethylenediamine (CAS: 111-74-0) (DEEDA), N,N′-diisopropylethylenediamine (CAS: 4013-94-9), N,N,N′,N′-tetramethyl-1,3-propanediamine (CAS: 110-95-2) (TMPDA), N,N,N′,N′-tetramethylmethanediamine (CAS: 51-80-9) (TMMDA), N,N,N′,N″,N″-pentamethyldiethylenetriamine (CAS: 3030-47-5) (PMDETA), diethylenetriamine (CAS: 111-40-0) (DIEN), triethylenetetraamine (CAS: 112-24-3) (TRIEN), Tris(2-aminoethyl)amine (CAS: 4097-89-6) (TREN, TAEA), 1,1,4,7,10,10-Hexamethyltriethylenetetramine (CAS: 3083-10-1) (HMTETA), 1,4,8,11-Tetraazacyclotetradecane (CAS: 295-37-4) (Cyclam), 1,4,7-Trimethyl-1,4,7-triazacyclononane (CAS: 96556-05-7), or 1,4,8,11-Tetramethyl-1,4,8,11-tetraazacyclotetradecane (CAS: 41203-22-9).

In some embodiments of the disclosure, the adduct forming ligand comprising phosphorous, such as a phosphine, a diphosphine, or a polyphosphine adduct forming ligand. For example, the transition metal compound may comprise at least one of, triethylphosphine (CAS: 554-70-1), trimethyl phosphite (CAS: 121-45-), 1,2-Bis(diethylphosphino)ethane (CAS: 6411-21-8) (BDEPE), or 1,3-Bis(diethylphosphino)propane (CAS: 29149-93-7).

In some embodiments of the disclosure, the adduct forming ligand comprising oxygen, such as an ether, a diether, or a polyether adduct forming ligand. For example, the transition metal compound may comprise at least one of, 1,4-dioxane (CAS: 123-91-1), 1,2-dimethoxyethane (CAS: 110-71-4) (DME, monoglyme), Diethylene glycol dimethyl ether (CAS: 111-96-6) (diglyme), Triethylene glycol dimethyl ether (CAS: 112-49-2) (triglyme), or 1,4,7,10-Tetraoxacyclododecane (CAS: 294-93-9) (12-Crown-4).

In some embodiments of the disclosure, the adduct forming ligand may comprise a thiother, or mixed ether amine, such as, for example, at least one of 1,7-Diaza-12-crown-4: 1,7-Dioxa-4,10-diazacyclododecane (CAS: 294-92-8), or 1,2-bis(methylthio)ethane (CAS: 6628-18-8).

In some embodiments, the transition metal halide compound may comprise cobalt chloride N,N,N′,N′-tetramethyl-1,2-ethylenediamine (CoCl₂(TMEDA)). In some embodiments, the transition metal halide compound may comprise cobalt bromide tetramethylethylenediamine (CoBr₂(TMEDA)). In some embodiments, the transition metal halide compound may comprise cobalt iodide tetramethylethylenediamine (CoI₂(TMEDA)). In some embodiments, the transition metal halide compound may comprise cobalt chloride N,N,N′,N′-tetramethyl-1,3-propanediamine (CoCl₂(TMPDA)). In some embodiments of the disclosure, the transition metal halide compound may comprise nickel chloride tetramethyl-1,3-propanediamine (NiCl₂(TMPDA)), or nickel iodide tetramethyl-1,3-propanediamine (NiI₂(TMPDA)).

In some embodiments of the disclosure, contacting the substrate with a first vapor phase reactant comprising a transition metal halide compound, i.e., the transition metal halide comprising an adduct forming ligand, may comprise exposing, i.e., contacting, the substrate to the transition metal halide compound for a time period of between about 0.01 seconds and about 60 seconds, between about 0.05 seconds and about 10 seconds, or between about 0.1 seconds and about 5.0 seconds. In addition, during the pulsing of the transition metal halide compound, the flow rate of the transition metal halide compound may be less than 2000 sccm, or less than 500 sccm, or even less than 100 sccm. In addition, during the pulsing of the transition metal halide compound over the substrate the flow rate of the transition metal halide compound may range from about 1 to 2000 sccm, from about 5 to 1000 sccm, or from about 10 to about 500 sccm.

Excess transition metal halide compound and reaction byproducts (if any) may be removed from the surface, e.g., by pumping with an inert gas. For example, in some embodiments of the disclosure, the methods may comprise a purge cycle wherein the substrate surface is purged for a time period of less than approximately 2.0 seconds. Excess transition metal halide compound and any reaction byproducts may be removed with the aid of a vacuum, generated by a pumping system, in fluid communication with the reaction chamber.

In a second phase of the deposition cycle the substrate may be contacted with a second vapor phase reactant comprising a reducing agent precursor. In some embodiments, the second vapor phase reactant may comprise a reducing agent and the transition metal containing film deposited by the cyclical deposition methods disclosed herein may comprise an elemental transition metal, or a transition metal nitride, or mixtures thereof.

In some embodiments of the disclosure, the reducing agent precursor may comprise at least one of hydrogen (H₂), a hydrogen (H₂) plasma, ammonia (NH₃), an ammonia (NH₃) plasma, hydrazine (N₂H₄), silane (SiH₄), disilane (Si₂H₆), trisilane (Si₃H₈), germane (GeH₄), digermane (Ge₂H₆), borane (BH₃), diborane (B₂H₆), tertiary butyl hydrazine (C₄H₁₂N₂), a selenium precursor, a boron precursor, a phosphorous precursor, a sulfur precursor, an organic precursor (e.g., alcohols, aldehydes, or carboxylic acids) or a hydrogen precursor. In some embodiments, the reducing agent precursor may comprise a hydrazine or substituted hydrazine precursor. In some embodiments, the reducing agent precursor, such as substituted hydrazine precursor may comprise tertiary butyl hydrazine (C₄H₁₂N₂). In some embodiments of the disclosure, methods may further comprise selecting the substituted hydrazine to comprise an alkyl group with at least four (4) carbon atoms, wherein “alkyl group” refers to a saturated or unsaturated hydrocarbon chain of at least four (4) carbon atoms in length, such as, but not limited to, butyl, pentyl, hexyl, heptyl and octyl and isomers thereof, such as n-, iso-, sec- and tert-isomers of those. The alkyl group may be straight chain or branched-chain and may embrace all structural isomer forms of the alkyl group. In some embodiments, the alkyl chain might be substituted. In some embodiments of the disclosure, the alkyl-hydrazine may comprise at least one hydrogen bonded to nitrogen. In some embodiments of the disclosure, the alkyl-hydrazine may comprise at least two hydrogens bonded to nitrogen. In some embodiments of the disclosure, the alkyl-hydrazine may comprise at least one hydrogen bonded to nitrogen and at least one alkyl chain bonded to nitrogen. In some embodiments of the disclosure, the reducing agent precursor may comprise an alkyl-hydrazine and may further comprise one or more of tertbutylhydrazine (C₄H₉N₂H₃), dimethylhydrazine or diethylhydrazine. In some embodiments of the disclosure, the substituted hydrazine has at least one hydrocarbon group attached to nitrogen. In some embodiments of the disclosure, the substituted hydrazine has at least two hydrocarbon groups attached to nitrogen. In some embodiments of the disclosure, the substituted hydrazine has at least three hydrocarbon groups attached to nitrogen. In some embodiments of the disclosure, the substituted hydrazine has at least one C₁-C₃ hydrocarbon group attached to nitrogen. In some embodiments of the disclosure, the substituted hydrazine has at least one C₄-C₁₀ hydrocarbon group attached to nitrogen. In some embodiments of the disclosure, the substituted hydrazine has linear, branched or cyclic or aromatic hydrocarbon group attached to nitrogen. In some embodiments of the disclosure, the substituted hydrazine comprises substituted hydrocarbon group attached to nitrogen.

In some embodiments of the disclosure, the substituted hydrazine has the following formula:

R^(I)R^(II)—N—NR^(III)R^(IV),  (1)

wherein R can be selected from hydrocarbon group, such as linear, branched, cyclic, aromatic or substituted hydrocarbon group and each of the R^(II), R^(III), R^(IV) groups can be independently selected to be hydrogen or hydrocarbon groups, such as linear, branched, cyclic, aromatic or substituted hydrocarbon group.

In some embodiments, in the formula (1) each of the R^(I), R^(II), R^(III), R^(IV) groups can be C1-C10 hydrocarbon, C1-C3 hydrocarbon, C4-C10 hydrocarbon or hydrogen, such as linear, branched, cyclic, aromatic or substituted hydrocarbon group. In some embodiments, at least one of the R^(I), R^(II), R^(III), R^(IV) groups comprises aromatic group such as phenyl group. In some embodiments, at least one of the R^(I), R^(II), R^(III), R^(IV) groups comprises methyl, ethyl, n-propyl, i-propyl, n-butyl, i-butyl, s-butyl, tertbutyl group or phenyl group. In some embodiments, at least two of the each R^(I), R^(II), R^(III), R^(IV) groups can be independently selected to comprise methyl, ethyl, n-propyl, i-propyl, n-butyl, i-butyl, s-butyl, tertbutyl group or phenyl group. In some embodiments, R^(II), R^(III) and R^(IV) groups are hydrogen. In some embodiments, at least two one of the R^(II), R^(III), R^(IV) groups are hydrogen. In some embodiments, at least one of the R^(II), R^(III), R^(IV) groups are hydrogen. In some embodiments, all of the R^(II), R^(III), R^(IV) groups are hydrocarbons.

In some embodiments of the disclosure, the reducing agent precursor may comprise an organic compound, for example, alcohols, aldehydes or carboxylic acids or other organic compounds may be utilized, For example, organic compounds not having metals or semimetals, but comprising —OH group. Alcohols can be primary alcohols, secondary alcohols, tertiary alcohols, polyhydroxy alcohols, cyclic alcohols, aromatic alcohols, and other derivatives of alcohols.

Primary alcohols have an —OH group attached to a carbon atom which is bonded to another carbon atom, in particular primary alcohols according to the general formula (III):

R1-OH  (III)

wherein R1 is a linear or branched C1-C20 alkyl or alkenyl groups, such as methyl, ethyl, propyl, butyl, pentyl or hexyl. Examples of primary alcohols include methanol, ethanol, propanol, butanol, 2-methyl propanol and 2-methyl butanol.

Secondary alcohols have an —OH group attached to a carbon atom that is bonded to two other carbon atoms. In particular, secondary alcohols have the general formula (IV):

wherein each R1 is selected independently from the group of linear or branched C1-C20 alkyl and alkenyl groups, such as methyl, ethyl, propyl, butyl, pentyl or hexyl. Examples of secondary alcohols include 2-propanol and 2-butanol.

Tertiary alcohols have an —OH group attached to a carbon atom that is bonded to three other carbon atoms. In particular, tertiary alcohols have the general formula (V):

wherein each R1 is selected independently from the group of linear or branched C1-C20 alkyl and alkenyl groups, such as methyl, ethyl, propyl, butyl, pentyl or hexyl. An example of a tertiary alcohol is tert-butanol.

Polyhydroxy alcohols, such as diols and triols, have primary, secondary and/or tertiary alcohol groups as described above. Examples of polyhydroxy alcohol are ethylene glycol and glycerol.

Cyclic alcohols have an —OH group attached to at least one carbon atom which is part of a ring of 1 to 10, such as 5-6 carbon atoms.

Aromatic alcohols have at least one —OH group attached either to a benzene ring or to a carbon atom in a side chain.

Organic compounds may comprise at least one aldehyde group (—CHO) are selected from the group consisting of compounds having the general formula (VI), alkanedial compounds having the general formula (VII), halogenated aldehydes and other derivatives of aldehydes.

Thus, in one embodiment organic compounds are aldehydes having the general formula (VI):

R3-CHO  (VI)

wherein R3 is selected from the group consisting of hydrogen and linear or branched C1-C20 alkyl and alkenyl groups, such as methyl, ethyl, propyl, butyl, pentyl or hexyl. In some embodiments, R3 is selected from the group consisting of methyl or ethyl. Exemplary compounds, but not limited to, according to formula (VI) are formaldehyde, acetaldehyde and butyraldehyde.

In another embodiment organic compounds are aldehydes having the general formula (VII):

OHC—R4-CHO  (VII)

wherein R4 is a linear or branched C1-C20 saturated or unsaturated hydrocarbon. Alternatively, the aldehyde groups may be directly bonded to each other (R4 is null).

Organic compounds containing at least one —COOH group can be selected from the group consisting of compounds of the general formula (VIII), polycarboxylic acids, halogenated carboxylic acids and other derivatives of carboxylic acids.

Thus, in one embodiment organic compounds are carboxylic acids having the general formula (VIII):

R5-COOH  (VIII)

wherein R5 is hydrogen or linear or branched C1-C20 alkyl or alkenyl group, such as methyl, ethyl, propyl, butyl, pentyl or hexyl, for example, methyl or ethyl. In some embodiments, R5 is a linear or branched C1-C3 alkyl or alkenyl group. Examples of compounds according to formula (VII) are formic acid, propanoic acid and acetic acid, in some embodiments, formic acid (HCOOH).

In some embodiments of the disclosure, exposing, i.e., contacting, the substrate to the second vapor phase reactant may comprise pulsing the second vapor phase reactant over the substrate for a time period of between 0.1 seconds and 2.0 seconds, or from about 0.01 seconds to about 10 seconds, or less than about 20 seconds, less than about 10 seconds or less than about 5 seconds. During the pulsing of the second vapor phase reactant over the substrate the flow rate of the second vapor phase reactant may be less than 50 sccm, or less than 25 sccm, or less than 15 sccm, or even less than 10 sccm.

Excess second vapor phase reactant and reaction byproducts, if any, may be removed from the substrate surface, for example, by a purging gas pulse and/or vacuum generated by a pumping system. Purging gas is preferably any inert gas, such as, without limitation, argon (Ar), nitrogen (N₂), helium (He), or, in some instances, hydrogen (H₂) could be used. A phase is generally considered to immediately follow another phase if a purge (i.e., purging gas pulse) or other reactant removal step intervenes.

A deposition cycle in which the substrate is alternatively contacted with the first vapor phase reactant (i.e., the metal halide compound) and the second vapor phase reactant (e.g., a reducing agent precursor) may be repeated one or more times until a desired thickness of a transition metal containing film is deposited. It should be appreciated that in some embodiments of the disclosure, the order of the contacting of the substrate with the first vapor phase reactant and the second vapor phase reactant may be such that the substrate is first contacted with the second vapor phase reactant followed by the first vapor phase reactant. In addition, in some embodiments, the cyclical deposition process may comprise contacting the substrate with the first vapor phase reactant one or more times prior to contacting the substrate with the second vapor phase reactant one or more times and similarly may alternatively comprise contacting the substrate with the second vapor phase reactant one or more times prior to contacting the substrate with the first vapor phase reactant one or more times.

In addition, some embodiments of the disclosure may comprise non-plasma reactants, e.g., the first and second vapor phase reactants are substantially free of ionized reactive species. In some embodiments, the first and second vapor phase reactants are substantially free of ionized reactive species, excited species or radical species. For example, both the first vapor phase reactant and the second vapor phase reactant may comprise non-plasma reactants to prevent ionization damage to the underlying substrate and the associated defects thereby created. The use of non-plasma reactants may be especially useful when the underlying substrate contains fragile fabricated, or least partially fabricated, semiconductor device structures as the high energy plasma species may damage and/or deteriorate device performance characteristics.

The cyclical deposition processes described herein, utilizing a first vapor phase reactant comprising a transition metal halide compound and a second vapor phase reactant comprising a reducing agent precursor to deposit a transition metal containing film, may be performed in an ALD or CVD deposition system with a heated substrate. For example, in some embodiments, methods may comprise heating the substrate to temperature of between approximately 150° C. and approximately 300° C., or even heating the substrate to a temperature of between approximately 200° C. and approximately 250° C. Of course, the appropriate temperature window for any given cyclical deposition process, such as, for an ALD reaction, will depend upon the surface termination and reactant species involved. Here, the temperature varies depending on the precursors being used and is generally at or below about 700° C. In some embodiments, the deposition temperature is generally at or above about 100° C. for vapor deposition processes, in some embodiments, the deposition temperature is between about 100° C. and about 300° C., and in some embodiments, the deposition temperature is between about 150° C. and about 250° C. In some embodiments, the deposition temperature is less than about 500° C., or less than below about 400° C., or less than about 350° C., or below about 300° C. In some instances, the deposition temperature can be below about 300° C., or below about 250° C., or below about 200° C., or below about 100° C. In some instances, the deposition temperature can be above about 20° C., above about 50° C. and above about 75° C. In some embodiments of the disclosure, the deposition temperature i.e., the temperature of the substrate during deposition is approximately 250° C.

In some embodiments, the growth rate of the transition metal containing film is from about 0.005 Å/cycle to about 5 Å/cycle, from about 0.01 Å/cycle to about 2.0 Å/cycle. In some embodiments, the growth rate of the transition metal containing film is more than about 0.05 Å/cycle, more than about 0.1 Å/cycle, more than about 0.15 Å/cycle, more than about 0.20 Å/cycle, more than about 0.25 Å/cycle, or more than about 0.3 Å/cycle. In some embodiments, the growth rate of the transition metal containing film is less than about 2.0 Å/cycle, less than about 1.0 Å/cycle, less than about 0.75 Å/cycle, less than about 0.5 Å/cycle, or less than about 0.2 Å/cycle. In some embodiments of the disclosure, the growth rate of the transition metal containing film may be approximately 0.8 Å/cycle.

The embodiments of the disclosure may comprise a cyclical deposition which may be illustrated in more detail by exemplary cyclical deposition method 100 of FIG. 1 . The method 100 may begin with a process block 110 which comprises, providing at least one substrate into a reaction chamber and heating the substrate to the deposition temperature. For example, the substrate may comprise one or more partially fabricated semiconductor device structures, the reaction chamber may comprise an atomic layer deposition reaction chamber, and the substrate may be heated to a deposition temperature of approximately less than 300° C. In addition, the pressure within the reaction chamber may be controlled to provide a reduced atmosphere in the reaction chamber. For example, the pressure within the reaction chamber during the cyclical deposition process may be less than 1000 mbar, or less than 100 mbar, or less than 10 mbar, or less than 5 mbar, or even, in some instances, less than 1 mbar.

The exemplary method 100 may continue with a process block 120 which comprises, contacting the substrate with a transition metal halide compound, for example, the substrate may be contacted with the transition metal halide compound for a time period of less than 2 seconds. In some embodiments of the disclosure, the transition metal compound may contact the substrate for a time period of between about 0.01 seconds and about 60 seconds, or between about 0.05 seconds and about 10 seconds, or between about 0.1 seconds and about 5 seconds. In addition, during the pulsing of the transition metal precursor over the substrate the flow rate of the transition metal precursor may be less than 2000 sccm, or less than 1000 sccm, or less than 500 sccm, or less than 200 sccm, or even less than 100 sccm.

Upon contacting the substrate with the transition metal halide compound, excess metal precursor and any reaction byproducts may be removed from the reaction chamber by a purge/pump process.

The method 100 may continue with a process block 130 which comprises, contacting the substrate with a second vapor phase reactant comprising a reducing agent precursor. The second vapor phase reactant, e.g., tertiary butyl hydrazine (C₄H₁₂N₂), may contact the substrate for a time period of approximately 4 seconds. In some embodiments of the disclosure, the second vapor phase reactant may contact the substrate for a time period of between about 0.01 seconds and about 60 seconds, or between about 0.05 seconds and about 10 seconds, or between about 0.1 seconds and about 5.0 seconds. In addition, during the pulsing of the second vapor phase reactant over the substrate, the flow rate of the second vapor phase reactant may be less than 2000 sccm, or less than 1000 sccm, or less than 500 sccm, or less than 200 sccm, or even less than 100 sccm.

Upon contacting the substrate with the second vapor phase reactant precursor, the excess second vapor phase reactant and any reaction byproducts may be removed from the reaction chamber by a purge/pump process.

The exemplary cyclical deposition method 100 wherein the substrate is alternatively and sequentially contacted with the transition metal halide compound (process block 120) and contacted with the second vapor phase reactant (process block 130) may constitute one deposition cycle. In some embodiments of the disclosure, the method of depositing a transition metal containing film may comprise repeating the deposition cycle one or more times. For example, the method 100 may continue with a decision gate 140 which determines if the cyclical deposition method 100 continues or exits via a process block 150. The decision gate 140 is determined based on the thickness of the transition metal containing film deposited, for example, if the thickness of the transition metal containing film is insufficient for the desired device structure, then the method 100 may return to the process block 120 and the processes of contacting the substrate with the transition metal halide compound and contacting the substrate with the second vapor phase reactant may be repeated one or more times. Once the transition metal containing film has been deposited to a desired thickness the method may exit via the process block 150 and the transition metal containing film and the underlying semiconductor structure may be subjected to additional processes to form one or more device structures.

In some embodiments of the disclosure, the transition metal containing film formed by the methods disclosed herein may comprise an elemental transition metal, a transition metal nitride, or mixtures thereof. In some embodiments, the transition metal containing film may comprise both an elemental transition metal and a transition metal nitride. In some embodiments, the transition metal containing film may comprise both elemental nickel and a nickel nitride. In some embodiments, the nickel nitride may comprise Ni₆N₂. In other embodiments, the transition metal containing film may comprise both elemental cobalt and a cobalt nitride. In some embodiments, the transition metal containing film may consist essentially of an elemental transition metal, such as, for example, nickel or cobalt.

In some embodiments of the disclosure, the methods of forming a transition metal containing film may further comprise, heating the transition metal containing film post deposition, i.e., once the transition metal containing film has been deposited to a desired thickness. For example, in some embodiments, the cyclical deposition methods disclosed herein may be utilized to deposit a transition metal containing film comprising both an elemental transition metal and a transition metal nitride. In such embodiments, a post deposition heat treatment may be applied to the transition metal containing film to reduce the transition metal nitride component in the deposited film resulting in a film consisting essentially of an elemental transition metal. As a non-limiting example, the cyclical deposition methods disclosed herein may be utilized to deposit a transition metal containing film comprising both elemental nickel and a nickel nitride and a post deposition heating process, i.e., thermally annealing the transition metal containing film, may result in a film consisting essentially of elemental nickel.

In some embodiments of the disclosure, the post deposition heating or annealing process may further comprise heating the deposited transition metal containing film to a temperature of less than 800° C., or less than 600° C., or less than 500° C., or even less than 400° C. In some embodiments, post deposition heating of transition metal containing film may comprise heating the transition metal containing film to a temperature between 800° C. and 400° C., or between 500° C. and 150° C., or even between 400° C. and 200° C.

In some embodiments of the disclosure, the post deposition heating or annealing process may be performed within a reaction chamber with a selected atmosphere. In some embodiments, the post deposition heating process may be performed in an inert atmosphere, such as, for example, a noble gas (e.g., He or Ar). In some embodiments, the post deposition heating process may be performed in a reductive atmosphere, such as, for example, forming gas (N₂+H₂). In some embodiments of the disclosure, the pressure in the reaction chamber during the post deposition heating process may be controlled at less than 100 Torr, or less than 1 Torr, or even less than 0.001 Torr.

Films, or layers, comprising a transition metal deposited according to some of the embodiments described herein may be continuous thin films. In some embodiments, the thin films comprising a transition metal deposited according to some of the embodiments described herein may be continuous at a thickness below approximately 100 nanometers, or below approximately 60 nanometers, or below approximately 50 nanometers, or below approximately 40 nanometers, or below approximately 30 nanometers, or below approximately 25 nanometers, or below approximately 20 nanometers, or below approximately 15 nanometers, or below approximately 10 nanometers, or below approximately 5 nanometers, or lower. The continuity referred to herein can be physically continuity or electrical continuity. In some embodiments, the thickness at which a film may be physically continuous may not be the same as the thickness at which a film is electrically continuous, and the thickness at which a film may be electrically continuous may not be the same as the thickness at which a film is physically continuous.

In some embodiments, a transition metal containing film deposited according to some of the embodiments described herein may have a thickness from about 20 nanometers to about 100 nanometers. In some embodiments, a transition metal containing film deposited according to some of the embodiments described herein may have a thickness from about 20 nanometers to about 60 nanometers. In some embodiments, a transition metal containing film deposited according to some of the embodiments described herein may have a thickness greater than about 20 nanometers, or greater than about 30 nanometers, or greater than about 40 nanometers, or greater than about 50 nanometers, or greater than about 60 nanometers, or greater than about 100 nanometers, or greater than about 250 nanometers, or greater than about 500 nanometers, or greater. In some embodiments, a transition metal containing film deposited according to some of the embodiments described herein may have a thickness of less than about 50 nanometers, less than about 30 nanometers, less than about 20 nanometers, less than about 15 nanometers, less than about 10 nanometers, less than about 5 nanometers, less than about 3 nanometers, less than about 2 nanometers, or even less than about 1 nanometer.

In some embodiments of the disclosure, the transition metal containing film may be deposited on a three-dimensional structure, e.g., a non-planar substrate comprising high aspect ratio features. In some embodiments, the step coverage of the transition metal containing film may be equal to or greater than about 50%, or greater than about 80%, or greater than about 90%, or greater than about 95%, or greater than about 98%, or greater than about 99%, or greater in structures having aspect ratios (height/width) of more than about 2, more than about 5, more than about 10, more than about 25, more than about 50, or even more than about 100.

In some embodiments of the disclosure, the transition metal containing films deposited according to the embodiments of the current disclosure may comprise less than about 50 atomic % oxygen, less than about 25 atomic % oxygen, less than about 10 atomic % oxygen, less than about 5 atomic % oxygen, less than about 2 atomic % oxygen, or even less than about 1 atomic % oxygen. In further embodiments, the transition metal containing films may comprise less than about 5 atomic % hydrogen, or less than about 2 atomic % of hydrogen, or less than about 1 atomic % of hydrogen, or even less than about 0.5 atomic % of hydrogen. In yet further embodiments, the transition metal containing films may comprise less than about 5 atomic % carbon, or less than about 2 atomic % carbon, or less than about 1 atomic % carbon, or even less than about 0.5 atomic % of carbon. In yet further embodiments, the transition metal containing films may comprise less than about 5 atomic % halide species, or less than about 2 atomic % halide species, or less than about 1 atomic % halide species, or even less than about 0.5 atomic % of halide species. In some embodiments, the atomic % of the transition metal containing materials may be determined utilizing time of flight elastic recoil detection analysis (ToF-ERDA) or x-ray photoelectron spectroscopy (XPS).

In some embodiments of the disclosure, the transition metal containing films deposited according to the embodiments of current disclosure may comprise both an elemental transition metal and a transition metal nitride. In such embodiments, the transition metal containing film may comprise greater than 70 atomic % of elemental transition metal, or greater than 80 atomic % of elemental transition metal, or greater than 90 atomic % of elemental transition metal. Further, in such embodiments, the transition metal containing film may comprise less than 25 atomic % of nitrogen, or less than 20 atomic % of nitrogen, or even less than 15 atomic % of nitrogen.

As a non-limiting example, FIG. 2 illustrates x-ray photoelectron spectroscopy (XPS) data for a transition metal containing film comprising both elemental nickel and a nickel nitride. Review of FIG. 2 illustrates that the exemplary film comprises a nickel atomic % of approximately 80 atomic %. Further review of FIG. 2 illustrates that the exemplary film comprises a nitrogen atomic % of approximately 17 atomic % at the surface of the film and a nitrogen atomic % ranging between approximately 5 atomic % and approximately 12 atomic % in the bulk of the deposited film.

In some embodiments of the disclosure, the transition metal containing films deposited according to some of the embodiments described herein may have an electrical resistivity of less than 50 μΩ-cm at a film thickness of less than 50 nanometers, or less than 25 nanometers, or less than 10 nanometers. In some embodiments of the disclosure, the transition metal containing films deposited according to some of the embodiments described herein may have an electrical resistivity of less than 25 μΩ-cm at a film thickness of less than 50 nanometers, or less than 25 nanometers, or less than 10 nanometers. In some embodiments of the disclosure, the transition metal containing films deposited according to some of the embodiments described herein may have an electrical resistivity of less than 10 μΩ-cm at a film thickness of less than 50 nanometers, or less than 35 nanometers, or less than 10 nanometers.

In some embodiments, the deposited transition metal containing film may have an electrical resistivity of less than about 20 μΩ-cm at a thickness of below 60 nanometers, or below 50 nanometers, or below 40 nanometers, or below 30 nanometers, or below 25 nanometers, or below 20 nanometers, or lower. In some embodiments, the deposited transition metal containing film may have an electrical resistivity of less than about 15 μΩ-cm at a thickness of below 60 nanometers, or below 50 nanometers, or below 40 nanometers, or below 30 nanometers, or below 25 nanometers, or even below 10 nanometers or lower. In some embodiments, the deposited transition metal containing film may have an electrical resistivity of less than about 10 μΩ-cm at a thickness of below 60 nanometers, or below 50 nanometers, or below 40 nanometers, or below 30 nanometers, or below 25 nanometers, or below 20 nanometers or lower.

In some embodiments, the deposited transition metal containing film may have an electrical resistivity of less than 10 μΩ-cm at a film thickness of less than 35 nanometers. In some embodiments, the deposited transition metal containing film may have an electrical resistivity of less than 15 μΩ-cm at a film thickness of less than 15 nanometers.

In some embodiments, the deposited transition metal containing film may have an electrical resistivity of less than 200 μΩ-cm, or less than 100 μΩ-cm, or less than 50 μΩ-cm, or less than 30 μΩ-cm, or less than 20 μΩ-cm, or less than 18 μΩ-cm, or less than 15 μΩ-cm, or less than 12 μΩ-cm, or less than 10 μΩ-cm, or less than 8 μΩ-cm at a film thickness of less than 100 nanometers.

In some embodiments, the deposited transition metal containing film may comprise both elemental nickel and a nickel nitride and in such embodiments the transition metal containing film may have an electrical resistivity of less than 200 μΩ-cm, or less than 100 μΩ-cm, or less than 50 μΩ-cm, or less than 30 μΩ-cm, or less than 20 μΩ-cm, or less than 18 μΩ-cm, or less than 15 μΩ-cm, or less than 12 μΩ-cm, or less than 10 μΩ-cm, or less than 8 μΩ-cm, or less than 5 μΩ-cm or lower at a film thickness of less than about 100 nanometers. Further, in such embodiments, the transition metal containing film may have an electrical resistivity of less than 20 μΩ-cm, or less than 18 μΩ-cm, or less than 15 μΩ-cm, or less than 12 μΩ-cm, or less than 10 μΩ-cm, or less than 8 μΩ-cm, or less than 5 μΩ-cm or lower at a thickness of less than 50 nanometers. Further, in such embodiments, the transition metal containing film may have an electrical resistivity of less than 4 μΩ-cm, or an electrical resistivity of less than 3 μΩ-cm, or even an electrical resistivity of less than 2 μΩ-cm. As a non-limiting example, a transition metal containing film comprise both elemental nickel and a nickel nitride deposited by the methods of the disclosure to a thickness of approximately 50 nanometers with an electrical resistivity of approximately less than 10 μΩ-cm.

In some embodiments, the deposited transition metal containing film may comprise both elemental cobalt and a cobalt nitride and in such embodiments the transition metal containing film may have an electrical resistivity of less than about 200 μΩ-cm, or less than about 100 μΩ-cm, or less than about 50 μΩ-cm, or less than about 30 μΩ-cm, or less than about 20 μΩ-cm, or less than about 18 μΩ-cm, or less than about 15 μΩ-cm, or less than about 12 μΩ-cm, or less than about 10 μΩ-cm, or less than about 8 μΩ-cm, or less than about 5 μΩ-cm or lower at a film thickness of less than about 100 nanometers. Further, in such embodiments, the transition metal containing film may have an electrical resistivity of less than about 20 μΩ-cm, or less than about 18 μΩ-cm, or less than about 15 μΩ-cm, or less than about 12 μΩ-cm, or less than about 10 μΩ-cm, or less than about 8 μΩ-cm, or less than about 5 μΩ-cm or lower at a thickness of less than about 50 nanometers. Further, in such embodiments, the transition metal containing film may have an electrical resistivity of less than 4 μΩ-cm, or an electrical resistivity of less than 3 μΩ-cm, or even an electrical resistivity of less than 2 μΩ-cm. As a non-limiting example, a transition metal containing film comprising both elemental cobalt and a cobalt nitride deposited by the methods of the disclosure to a thickness of less than 50 nanometers with an electrical resistivity of less than 10 μΩ-cm.

The example embodiments of the disclosure described above do not limit the scope of the invention, since these embodiments are merely examples of the embodiments of the invention, which is defined by the appended claims and their legal equivalents. Any equivalent embodiments are intended to be within the scope of this invention. Indeed, various modifications of the disclosure, in addition to those shown and described herein, such as alternative useful combination of the elements described, may become apparent to those skilled in the art from the description. Such modifications and embodiments are also intended to fall within the scope of the appended claims. 

What is claimed is:
 1. A method of forming a transition metal containing film on a substrate by a cyclical deposition process, the method comprising: contacting the substrate with a first vapor phase reactant comprising a transition metal halide compound comprising a monodentate, bidentate, or multidentate containing adduct ligand; and contacting the substrate with a second vapor phase reactant comprising a reducing agent precursor, wherein the adduct ligand coordinates to a transition metal atom through at least one of a nitrogen atom, a phosphorous atom, an oxygen atom, or a sulfur atom.
 2. The method of claim 1, wherein the adduct ligand comprises two nitrogen atoms, each of nitrogen atoms bonded to at least one carbon atom.
 3. The method of claim 1, wherein the transition metal halide compound comprise a transition metal chloride.
 4. The method of claim 3, wherein the transition metal chloride compound comprises at least one of a cobalt chloride or a nickel chloride.
 5. The method of claim 4, wherein the transition metal chloride compound comprises at least one of cobalt chloride (TMEDA) or nickel chloride (TMPDA).
 6. The method of claim 1, wherein the reducing agent precursor is selected from the group consisting of: tertiary butyl hydrazine (C₄H₁₂N₂), hydrogen (H₂), a hydrogen (H₂) plasma, ammonia (NH₃), an ammonia (NH₃) plasma, hydrazine (N₂H₄), silane (SiH₄), disilane (Si₂H₆), trisilane (Si₃H₈), germane (GeH₄), digermane (Ge₂H₆), borane (BH₃), and diborane (B₂H₆).
 7. The method of claim 6, wherein the reducing agent precursor comprises tertiary butyl hydrazine (C₄H₁₂N₂).
 8. The method of claim 1, wherein the transition metal containing film comprises both an elemental transition metal and a transition metal nitride.
 9. The method of claim 8, wherein the transition metal containing film comprises both elemental nickel and a nickel nitride.
 10. The method of claim 9, wherein the nickel nitride comprises Ni₆N₂.
 11. The method of claim 8, wherein the transition metal containing film comprises both elemental cobalt and a cobalt nitride.
 12. The method of claim 1, wherein the cyclical deposition process comprises an atomic layer deposition process.
 13. The method of claim 1, wherein the cyclical deposition process comprises a cyclical chemical vapor deposition process.
 14. The method of claim 1, further comprising heating the substrate to a temperature less than 250° C.
 15. The method of claim 1, further comprising heating the transition metal containing film post deposition.
 16. The method of claim 15, wherein the transition metal containing film is heated to a temperature of less than 800° C.
 17. The method of claim 1, wherein the reducing agent precursor is selected from the group consisting of substituted hydrazines.
 18. The method of claim 1, wherein the reducing agent precursor is selected from the group consisting of alkyl-hydrazines.
 19. The method of claim 1, wherein the transition metal halide compound comprises the bidentate containing adduct ligand.
 20. The method of claim 1, wherein the transition metal halide compound comprises the multidentate containing adduct ligand. 